GALEX Gas Injection System with four SEM and FIB deposition precursors
DESIGN SPECIFICATIONS
DESIGN HIGHLIGHTS
- Easy installation, alignment, and start-up
- Compatible with C, W, Mo, Pt FIB deposition precursors
- User-exchangeable and re-loadable cartridges, self-service precursor exchange
- Port-mounted gas injector is always ready, no lengthy preparations prior to operation
- Most precursors ready for injection within seconds
- Rapid switch of precursor chemistry, no degassing prior to use of gas injector for SEM or FIB deposition
- Injection of multiple precursors on the same port, no need for position correction or re-alignment
- Desktop or rack-mountable controller, push-button operation or computerized GUI control
- Self-sealed precursor precursors cartridges improve handling safety
- Double-sealed containers comply with safety regulations for shipping FIB deposition precursors
- Fail-safe normally-closed gas injector process valves for safe power-loss shutdown
- Fail-safe retraction facilitates withdrawal of gas injector in case of air pressure loss or power shutdown
- Customization of gas injector for experimental precursors and FIB deposition application development support
- Designed and built by people with decades of expertise in FIB instrumentation, gas injection and FIB GAE
- Gas Assisted Etching version is available
- UHV-compatible version upon request
DESIGN HIGHLIGHTS
- Desktop or rack-mountable controller, push-button operation or computerized GUI control
- Integration with GALEX GIS or standalone operation