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High Voltage FIB/SEM Gun Power

BACKGROUND

PBS&T is a third-party provider of service, upgrades, spare parts, consumables, and process development support for broad range of particle beam instrumentation, including Focused Ion Beam (FIB) systems manufactured by former Micrion Company, FIB and FIB/SEM equipment manufactured by FEI Company, Scanning Electron Microscopy (SEM) tools from various SEM manufacturers including industrial CD-SEM and DR-SEM tools made by Opal and Applied Materials.

 

REASONABLY PRICED CONSUMABLES FOR FIB AND SEM INSTRUMENTS
 

Particle Beam Systems and Technology (PBS&T) provides components for ion columns, including:

  • Extractors
  • Suppressors
  • Shields
  • Filaments
  • Apertures and Aperture Strips


We also provide consumables and gas refills for FEI FIB Systems including:

  • Dielectric Etching (XeF2, Xenon Difluoride)
  • C deposition (Naphtalene)
  • Pt deposition
  • W deposition
  • Cu deposition
  • On special-order and only in USA:
  • Cl (Chlorine)
  • I (Iodine)


Consumable parts for FIB Systems from other OEMs are also available, as well as refurbishment of extractors, suppressors, and CCIG components. In addition, other gas chemistries are available upon request.